List of Abbreviations p. XLI
Introduction
1 Introduction to Nanotechnology Bharat Bhushan p. 1
1.1 Nanotechnology - Definition and Examples p. 1
1.2 Background and Research Expenditures p. 4
1.3 Lessons from Nature (Biomimetics) p. 6
1.4 Applications in Different Fields p. 7
1.5 Various Issues p. 8
1.6 Research Training p. 8
1.7 Organization of Handbook p. 9
References p. 9
Part A Nanostructures, Micro/Nanofabrication and Materials
2 Nanomaterials Synthesis and Applications: Molecule-Based Devices Frangisco M. Raymo p. 13
2.1 Chemical Approaches to Nanostructured Materials p. 13
2.2 Molecular Switches and Logic Gates p. 18
2.3 Solid State Devices p. 26
2.4 Conclusions and Outlook p. 38
References p. 39
3 Introduction to Carbon Nanotubes Marc Monthioux and Philippe Serp and Emmanuel Flahaut and Manitra Razafinimanana and Christophe Laurent and Alain Peigney and Wolfgang Bacsa and Jean-Marc Broto p. 43
3.1 Structure of Carbon Nanotubes p. 44
3.2 Synthesis of Carbon Nanotubes p. 49
3.3 Growth Mechanisms of Carbon Nanotubes p. 65
3.4 Properties of Carbon Nanotubes p. 69
3.5 Carbon Nanotube-Based Nano-Objects p. 74
3.6 Applications of Carbon Nanotubes p. 80
3.7 Concluding Remarks p. 95
References p. 95
4 Nanowires Mildred S. Dresselhaus and Yu-Ming Lin and Oded Rabin and Marcie R. Black and Jing Kong and Gene Dresselhaus p. 113
4.1 Synthesis p. 115
4.2 Characterization and Physical Properties of Nanowires p. 124
4.3 Applications p. 145
4.4 Concluding Remarks p. 152
References p. 153
5 Template-Based Synthesis of Nanorod or Nanowire Arrays Huamei (Mary) Shang and Guozhong Cao p. 161
5.1 Template-Based Approach p. 162
5.2 Electrochemical Deposition p. 163
5.3 Electrophoretic Deposition p. 167
5.4 Template Filling p. 172
5.5 Converting from Reactive Templates p. 174
5.6 Summary and Concluding Remarks p. 174
References p. 175
6 Three-Dimensional Nanostructure Fabrication by Focused Ion Beam Chemical Vapor Deposition Shinji Matsui p. 179
6.1 Three-Dimensional Nanostructure Fabrication p. 180
6.2 Nanoelectromechanics p. 183
6.3 Nanooptics: Brilliant Blue from a Morpho Butterfly Scale Quasi-Structure p. 190
6.4 Nanobiology p. 191
6.5 Summary p. 194
References p. 195
7 Introduction to Micro/Nanofabrication Babak Ziaie and Antonio Baldi and Massood Z. Atashbar p. 197
7.1 Basic Microfabrication Techniques p. 197
7.2 MEMS Fabrication Techniques p. 210
7.3 Nanofabrication Techniques p. 222
7.4 Summary and Conclusions p. 233
References p. 233
8 Nanoimprint Lithography Helmut Schift, Anders Kristensen p. 239
8.1 Emerging Nanopatterning Methods p. 241
8.2 Nanoimprint Process p. 244
8.3 Tools and Materials for Nanoimprint p. 255
8.4 Applications p. 262
8.5 Conclusion and Outlook p. 268
References p. 270
9 Stamping Techniques for Micro- and Nanofabrication Etienne Menard and John A. Rogers p. 279
9.1 High-Resolution Stamps p. 280
9.2 Microcontact Printing p. 282
9.3 Nanotransfer Printing p. 284
9.4 Applications p. 288
9.5 Conclusions p. 295
References p. 295
10 Material Aspects of Micro- and Nanoelectromechanical Systems Christian A. Zorman and Mehran Mehregany p. 299
10.1 Silicon p. 299
10.2 Germanium-Based Materials p. 306
10.3 Metals p. 307
10.4 Harsh-Environment Semiconductors p. 309
10.5 Ga As, InP, and Related III-V Materials p. 314
10.6 Ferroelectric Materials p. 316
10.7 Polymer Materials p. 317
10.8 Future Trends p. 318
References p. 319
11 Complexity and Emergence as Design Principles for Engineering Decentralized Nanoscale Systems David Wendell and Dean Ho and Carlo D. Montemagno p. 323
11.1 Definitions p. 324
11.2 Examples and Experimental Analysis of Decentralized Systems in Nature p. 331
11.3 Engineering Emergent Behavior into Nanoscale Systems: Thematic Examples of Synthetic Decentralized Nanostructures p. 334
11.4 Conclusion p. 343
References p. 343
12 Nanometer-Scale Thermoelectric Materials Joseph P. Heremans p. 345
12.1 The Promise of Thermoelectricity p. 347
12.2 Theory of Thermoelectric Transport in Low-Dimensional Solids p. 349
12.3 Two-Dimensional Thermoelectric Transport in Quantum Wells p. 359
12.4 One-Dimensional Thermoelectric Transport in Quantum Wires p. 360
12.5 Quasi-Zero-Dimensional Systems, Solids Containing Quantum Dots p. 366
12.6 Conclusions p. 370
References p. 370
13 Nano- and Microstructured Semiconductor Materials for Macroelectronics Yugang Sun and Seung-Hyun Hur and John A. Rogers p. 375
13.1 Classes of Semiconductor Nanomaterials and their Preparation p. 377
13.2 Generation of Thin Films of Ordered Nanostructures on Plastic Substrates p. 384
13.3 Applications for Macroelectronics p. 389
13.4 Outlook p. 395
References p. 395
Part B Mems/Nems and Biomems/Nems
14 Next-Generation DNA Hybridization and Self-Assembly Nanofabrication Devices Michael J. Heller and Benjamin Sullivan and Dietrich Dehlinger and Paul Swanson and Dalibor Hodko p. 401
14.1 Electronic Microarray Technology p. 403
14.2 Electric Field-Assisted Nanofabrication Processes p. 409
14.3 Conclusions p. 411
References p. 411
15 Mems/Nems Devices and Applications Darrin J. Young and Christian A. Zorman and Mehran Mehregany p. 415
15.1 Mems Devices and Applications p. 417
15.2 Nanoelectromechanical Systems (Nems) p. 436
15.3 Current Challenges and Future Trends p. 439
References p. 440
16 Nanomechanical Cantilever Array Sensors Hans Peter Lang and Martin Hegner and Christoph Gerber p. 443
16.1 Technique p. 443
16.2 Cantilever Array Sensors p. 445
16.3 Modes of Operation p. 446
16.4 Microfabrication p. 450
16.5 Measurement Set-Up p. 450
16.6 Functionalization Techniques p. 453
16.7 Applications p. 455
16.8 Conclusions and Outlook p. 455
References p. 456
17 Therapeutic Nanodevices Stephen C. Lee and Mark Ruegsegger and Philip D. Barnes and Bryan R. Smith and Mauro Ferrari p. 461
17.1 Definitions and Scope of Discussion p. 462
17.2 Synthetic Approaches: """"Top-Down"""" Versus """"Bottom-Up"""" Approaches for Nanotherapeutic Device Components p. 467
17.3 Technological and Biological Opportunities p. 470
17.4 Applications of Nanotherapeutic Devices p. 488
17.5 Concluding Remarks: Barriers to Practice and Prospects p. 496
References p. 499
18 G-Protein Coupled Receptors: Surface Display and Biosensor Technology Edward J. McMurchie and Wayne R. Leifert p. 505
18.1 The GPCR: G-Protein Activation Cycle p. 507
18.2 Preparation of GPCRs and G-proteins p. 509
18.3 Measurement of GPCR Signaling p. 509
18.4 GPCR Biosensing p. 511
18.5 Protein Engineering in GPCR Signaling p. 517
18.6 The Future of GPCRs in Nanobiotechnologies p. 520
References p. 520
19 Microfluidics and Their Applications to Lab-on-a-Chip Jin-Woo Choi p. Chong H. Ahn
19.1 Materials for Microfluidic Devices and Micro/Nanofabrication Techniques p. 524
19.2 Active Microfluidic Devices p. 527
19.3 Smart Passive Microfluidic Devices p. 532
19.4 Lab-on-a-Chip for Biochemical Analysis p. 540
References p. 545
20 Centrifuge-Based Fluidic Platforms Jim Zoval and Guangyao Jia and Horacio Kido and Jitae Kim and Nahui Kim and Marc J. Madou p. 549
20.1 Why Centripetal Force for Fluid Propulsion? p. 550
20.2 Compact Disc or Micro-Centrifuge Fluidics p. 552
20.3 CD Applications p. 556
20.4 Conclusion p. 567
References p. 568
21 Micro/Nanodroplets in Microfluidic Devices """"Mike"""" Yung-Chieh Tan and Abraham """"Abe"""" Lee p. 571
21.1 Active or Programmable Droplet System p. 572
21.2 Passive Droplet Control Techniques p. 575
21.3 Applications p. 582
21.4 Conclusion p. 584
References p. 584
Part C Scanning Probe Microscopy
22 Scanning Probe Microscopy - Principle of Operation, Instrumentation, and Probes Bharat Bhushan and Othmar Marti p. 591
22.1 Scanning Tunneling Microscope p. 593
22.2 Atomic Force Microscope p. 597
22.3 AFM Instrumentation and Analyses p. 613
References p. 630
23 Probes in Scanning Microscopies Jason H. Hafner p. 637
23.1 Atomic Force Microscopy p. 638
23.2 Scanning Tunneling Microscopy p. 648
References p. 649
24 Noncontact Atomic Force Microscopy and Related Topics Franz J. Giessibl and Yasuhiro Sugawara and Seizo Morita and Hirotaka Hosoi and Kazuhisa Sueoka and Koichi Mukasa and Akira Sasahara and Hiroshi Onishi p. 651
24.1 Atomic Force Microscopy (AFM) p. 652
24.2 Applications to Semiconductors p. 657
24.3 Applications to Insulators p. 663
24.4 Applications to Molecules p. 670
References p. 673
25 Low-Temperature Scanning Probe Microscopy Markus Morgenstern and Alexander Schwarz and Udo D. Schwarz p. 679
25.1 Microscope Operation at Low Temperatures p. 680
25.2 Instrumentation p. 681
25.3 Scanning Tunneling Microscopy and Spectroscopy p. 685
25.4 Scanning Force Microscopy and Spectroscopy p. 698
References p. 710
26 Higher-Harmonic Force Detection in Dynamic Force Microscopy Ozgur Sahin and Calvin F. Quate and Olav Solgaard and Franz J. Giessibl p. 717
26.1 Modeling of Tip-Sample Interaction Forces in Tapping-Mode AFM p. 718
26.2 Enhancing a Specific Harmonic of the Interaction Force Using a Flexural Resonance p. 721
26.3 Recovering the Time-Resolved Tip-Sample Forces with Torsional Vibrations p. 724
26.4 Application Examples p. 727
26.5 Higher Harmonic/Atomic Force Microscopy with Small Amplitudes p. 731
References p. 735
27 Dynamic Modes of Atomic Force Microscopy A. Schirmeisen and B. Anczykowski and Harald Fuchs p. 737
27.1 Motivation: Measurement of a Single Atomic Bond p. 737
27.2 Harmonic Oscillator: A Model System for Dynamic AFM p. 741
27.3 Dynamic AFM Operational Modes p. 743
27.4 Q-Control p. 754
27.5 Dissipation Processes Measured with Dynamic AFM p. 758
27.6 Conclusion p. 762
References p. 762
28 Molecular Recognition Force Microscopy: From Simple Bonds to Complex Energy Landscapes Peter Hinterdorfer and Ziv Reich p. 767
28.1 Ligand Tip Chemistry p. 768
28.2 Immobilization of Receptors onto Probe Surfaces p. 770
28.3 Single-Molecule Recognition Force Detection p. 771
28.4 Principles of Molecular Recognition Force Spectroscopy p. 773
28.5 Recognition Force Spectroscopy: From Isolated Molecules to Biological Membranes p. 775
28.6 Recognition Imaging p. 782
28.7 Concluding Remarks p. 784
References p. 784
Part D Nanotribology and Nanomechanics
29 Nanotribology, Nanomechanics and Materials Characterization Bharat Bhushan p. 791
29.1 Description of AFM/FFM and Various Measurement Techniques p. 793
29.2 Surface Imaging, Friction and Adhesion p. 804
29.3 Wear, Scratching, Local Deformation, and Fabrication/Machining p. 829
29.4 Indentation p. 837
29.5 Boundary Lubrication p. 841
29.6 Closure p. 852
References p. 853
30 Surface Forces and Nanorheology of Molecularly Thin Films Marina Ruths and Jacob N. Israelachvili p. 859
30.1 Introduction: Types of Surface Forces p. 860
30.2 Methods Used to Study Surface Forces p. 862
30.3 Normal Forces Between Dry (Unlubricated) Surfaces p. 866
30.4 Normal Forces Between Surfaces in Liquids p. 870
30.5 Adhesion and Capillary Forces p. 880
30.6 Introduction: Different Modes of Friction and the Limits of Continuum Models p. 886
30.7 Relationship Between Adhesion and Friction Between Dry (Unlubricated and Solid Boundary Lubricated) Surfaces p. 887
30.8 Liquid Lubricated Surfaces p. 898
30.9 Effects of Nanoscale Texture on Friction p. 909
References p. 913
31 Interfacial Forces and Spectroscopic Study of Confined Fluids Y. Elaine Zhu and Ashis Mukhopadhyay and Steve Granick p. 925
31.1 Hydrodynamic Force of Fluids Flowing in Micro- to Nanofluidics: A Question About No-Slip Boundary Condition p. 926
31.2 Hydrophobic Interaction and Water at a Hydrophobicity Interface p. 932
31.3 Ultrafast Spectroscopic Study of Confined Fluids: Combining Ultra-Fast Spectroscopy with Force Apparatus p. 938
31.4 Contrasting Friction with Diffusion in Molecularly Thin Films p. 941
31.5 Diffusion of Confined Molecules During Shear p. 945
31.6 Summary p. 946
References p. 946
32 Scanning Probe Studies of Nanoscale Adhesion Between Solids in the Presence of Liquids and Monolayer Films Robert W. Carpick and James Batteas and Maarten P.de Boer p. 951
32.1 The Importance of Adhesion at the Nanoscale p. 951
32.2 Techniques for Measuring Adhesion p. 952
32.3 Calibration of Forces, Displacements, and Tips p. 957
32.4 The Effect of Liquid Capillaries on Adhesion p. 959
32.5 Self-Assembled Monolayers p. 968
32.6 Concluding Remarks p. 973
References p. 974
33 Friction and Wear on the Atomic Scale Enrico Gnecco and Roland Bennewitz and Oliver Pfeiffer and Anisoara Socoliuc and Ernst Meyer p. 981
33.1 Friction Force Microscopy in Ultrahigh Vacuum p. 982
33.2 The Tomlinson Model p. 986
33.3 Friction Experiments on the Atomic Scale p. 988
33.4 Thermal Effects on Atomic Friction p. 992
33.5 Geometry Effects in Nanocontacts p. 996
33.6 Wear on the Atomic Scale p. 999
33.7 Molecular Dynamics Simulations of Atomic Friction and Wear p. 1001
33.8 Energy Dissipation in Noncontact Atomic Force Microscopy p. 1004
33.9 Conclusion p. 1006
References p. 1007
34 Velocity Dependence of Nanoscale Friction, Adhesion and Wear Nikhil S. Tambe and Bharat Bhushan p. 1011
34.1 Bridging Science and Engineering for Nanotribological Investigations p. 1012
34.2 Instrumentation p. 1014
34.3 Velocity Dependence of Nanoscale Friction and Adhesion p. 1017
34.4 Dominant Friction Regimes and Mechanisms p. 1020
34.5 Nanoscale Friction Mapping p. 1035
34.6 Wear Studies at High Sliding Velocities p. 1037
34.7 Identifying Materials with Low Friction and Adhesion for Nanotechnological Applications p. 1043
34.8 Closure p. 1045
References p. 1046
35 Computer Simulations of Nanometer-Scale Indentation and Friction Susan B. Sinnott and Seong-Jun Heo and Donald W. Brenner and Judith A. Harrison p. 1051
35.1 Computational Details p. 1052
35.2 Indentation p. 1057
35.3 Friction and Lubrication p. 1072
35.4 Conclusions p. 1096
References p. 1097
36 Nanoscale Mechanical Properties - Measuring Techniques and Applications Andrzej J. Kulik and Andras Kis and G茅rard Gremaud and Stefan Hengsberger and Gustavo S. Luengo and Philippe K. Zysset and L谩szl贸 Forr贸 p. 1107
36.1 Local Mechanical Spectroscopy via Dynamic Contact AFM p. 1108
36.2 Static Methods - Mesoscopic Samples, Shear and Young's Modulus p. 1113
36.3 Scanning Nanoindentation as a Tool to Determine Nanomechanical Properties of Biological Tissue Under Dry and Wet Conditions p. 1121
36.4 General Summary and Perspectives p. 1132
References p. 1133
37 Nanomechanical Properties of Solid Surfaces and Thin Films Adrian B. Mann p. 1137
37.1 Instrumentation p. 1138
37.2 Data Analysis p. 1144
37.3 Modes of Deformation p. 1152
37.4 Thin Films and Multilayers p. 1156
37.5 Developing Areas p. 1161
References p. 1161
38 Scale Effect in Mechanical Properties and Tribology Bharat Bhushan and Michael Nosonovsky p. 1167
38.1 Nomenclature p. 1167
38.2 Introduction p. 1169
38.3 Scale Effect in Mechanical Properties p. 1171
38.4 Scale Effect in Surface Roughness and Contact Parameters p. 1175
38.5 Scale Effect in Friction p. 1178
38.6 Scale Effect in Wear p. 1190
38.7 Scale Effect in Interface Temperature p. 1190
38.8 Closure p. 1191
38 A Statistics of Particle Size Distribution p. 1192
References p. 1196
39 Mechanics of Biological Nanotechnology Rob Phillips and Prashant K. Purohit and Jane Kondev p. 1199
39.1 Science at the Biology-Nanotechnology Interface p. 1200
39.2 Scales at the Bio-Nano Interface p. 1206
39.3 Modeling at the Nano-Bio Interface p. 1212
39.4 Nature's Nanotechnology Revealed: Viruses as a Case Study p. 1215
39.5 Concluding Remarks p. 1220
References p. 1220
40 Structural, Nanomechanical and Nanotribological Characterization of Human Hair Using Atomic Force Microscopy and Nanoindentation Bharat Bhushan and Carmen La Torre and Guohua Wei p. 1223
40.1 Human Hair, Skin and Hair Care Products p. 1226
40.2 Experimental Techniques p. 1235
40.3 Structural Characterization Using an AFM p. 1246
40.4 Nanomechanical Characterization Using Nanoindentation and Nanoscratch p. 1252
40.5 Macroscale Tribological Characterization p. 1266
40.6 Nanotribological Characterization Using an AFM p. 1269
40.7 Closure p. 1300
40 A Conditioner Thickness Approximation p. 1302
References p. 1302
41 Mechanical Properties ofNanostructures Bharat Bhushan p. 1305
41.1 Experimental Techniques for Measurementof Mechanical Properties of Nanostructures p. 1307
41.2 Experimental Results and Discussion p. 1312
41.3 Finite Element Analysis of Nanostructures with Roughness and Scratches p. 1326
41.4 Closure p. 1332
References p. 1333
Part E Molecularly Thick Films for Lubrication
42 Nanotribology of Ultrathin and Hard Amorphous Carbon Films Bharat Bhushan p. 1339
42.1 Description of Common Deposition Techniques p. 1343
42.2 Chemical and Physical Coating Characterization p. 1347
42.3 Micromechanical and Tribological Coating Characterization p. 1353
42.4 Closure p. 1374
References p. 1375
43 Self-Assembled Monolayers (SAMs) for Controlling Adhesion, Friction, and Wear Bharat Bhushan p. 1379
43.1 A Brief Organic Chemistry Primer p. 1382
43.2 Self-Assembled Monolayers: Substrates, Spacer Chains; and End Groups in the Molecular Chains p. 1386
43.3 Tribological Properties of SAMs p. 1389
43.4 Closure p. 1410
References p. 1411
44 Nanoscale Boundary Lubrication Studies Bharat Bhushan and Huiwen Liu p. 1417
44.1 Lubricants Details p. 1418
44.2 Nanodeformation, Molecular Conformation, and Lubricant Spreading p. 1420
44.3 Boundary Lubrication Studies p. 1422
44.4 Closure p. 1436
References p. 1436
45 Kinetics and Energetics in Nanolubrication Rene M. Overney and George W. Tyndall and Jane Frommer p. 1439
45.1 Background: From Bulk to Molecular Lubrication p. 1441
45.2 Thermal Activation Model of Lubricated Friction p. 1443
45.3 Functional Behavior of Lubricated Friction p. 1444
45.4 Thermodynamical Models Based on Small and Nonconforming Contacts p. 1446
45.5 Limitationof the Gaussian Statistics - The Fractal Space p. 1447
45.6 Fractal Mobility in Reactive Lubrication p. 1448
45.7 Metastable Lubricant Systems in Large Conforming Contacts p. 1450
45.8 Conclusion p. 1451
References p. 1451
Part F Industrial Applications
46 The """"Millipede"""" - A Nanotechnology-Based AFM Data-Storage System Gerd K. Binnig and G. Cherubini and M. Despont and Urs T. D眉rig and Evangelos Eleftheriou and H. Pozidis and Peter Vettiger p. 1457
46.1 The Millipede Concept p. 1459
46.2 Thermomechanical AFM Data Storage p. 1460
46.3 Array Design, Technology, and Fabrication p. 1462
46.4 Array Characterization p. 1463
46.5 x/y/z Medium Microscanner p. 1465
46.6 First Write/Read Results with the 32x32 Array Chip p. 1467
46.7 Polymer Medium p. 1469
46.8 Read Channel Model p. 1475
46.9 System Aspects p. 1479
46.10 Conclusions p. 1484
References p. 1484
47 Nanotechnology for Data Storage Applications Dror Sarid and Brendan McCarthy and Ghassan E. Jabbour p. 1487
47.1 Current Status of Commercial Data Storage Devices p. 1489
47.2 Opportunities Offered by Nanotechnology for Data Storage p. 1495
47.3 Conclusion p. 1506
References p. 1507
48 Microactuators for Dual-Stage Servo Systems in Magnetic Disk Files Roberto Horowitz and Tsung-Lin (Tony) Chen and Kenn Oldham and Yunfeng Li and Xinghui Huang and Shih-Chung Kon and Ryozo Nagamune p. 1509
48.1 Design of the Electrostatic Microactuator p. 1511
48.2 Fabrication p. 1520
48.3 Servo Control Design of MEMS Microactuator Dual-Stage Servo Systems p. 1528
48.4 Conclusions and Outlook p. 1541
References p. 1542
49 Nanorobotics Bradley J. Nelson, Lixin Dong p. 1545
49.1 Overview of Nanorobotics p. 1546
49.2 Actuation at Nanoscales p. 1547
49.3 Nanorobotic Manipulation Systems p. 1549
49.4 Nanorobotic Assembly p. 1555
49.5 Applications p. 1563
References p. 1566
Part G Micro/Nanodevice Reliability
50 Nanotribology and Materials Characterization of MEMS/NEMS and BioMEMS/BioNEMS Materials and Devices Bharat Bhushan p. 1575
50.1 Introduction p. 1576
50.2 Tribological Studies of Silicon and Related Materials p. 1593
50.3 Lubrication Studies for MEMS/NEMS p. 1600
50.4 Tribological Studies of Biological Molecules on Silicon-Based Surfaces and of Coated Polymer Surfaces p. 1606
50.5 Nanopatterned Surfaces p. 1611
50.6 Component-Level Studies p. 1616
50.7 Conclusion p. 1627
50 A Appendix Micro/Nanofabrication Methods p. 1628
References p. 1631
51 Experimental Characterization Techniques for Micro/Nanoscale Devices Kimberly L. Turner and Peter G. Hartwell p. 1639
51.1 Motivation p. 1639
51.2 Applications Utilizing Dynamic MEMS/NEMS p. 1640
51.3 Test/Characterization Techniques p. 1640
51.4 Example: Characterizing an In-Plane MEMS Actuator p. 1654
51.5 Design for Test p. 1659
References p. 1659
52 Failure Mechanisms in MEMS/NEMS Devices W. Merlijn van Spengen and Robert Modlinski and Robert Puers and Anne Jourdain p. 1663
52.1 Failure Modes and Failure Mechanisms p. 1663
52.2 Stiction and Charge-Related Failure Mechanisms p. 1665
52.3 Creep, Fatigue, Wear, and Packaging-Related Failures p. 1671
52.4 Conclusions p. 1681
References p. 1681
53 Mechanical Properties of Micromachined Structures Harold Kahn p. 1685
53.1 Measuring Mechanical Properties of Films on Substrates p. 1685
53.2 Micromachined Structures for Measuring Mechanical Properties p. 1686
53.3 Measurements of Mechanical Properties p. 1696
References p. 1699
54 Thermo- and Electromechanical Behavior of Thin-Film Micro and Nanostructures Martin L. Dunn and Shawn J. Cunningham p. 1703
54.1 Thermomechanics of Multilayer Thin-Film Structures p. 1705
54.2 Electromechanics of Thin-Film Structures p. 1726
54.3 Summaryand Topics not Covered p. 1744
References p. 1745
55 High Volume Manufacturing and Field Stability of MEMS Products Jack Martin p. 1749
55.1 Manufacturing Strategy p. 1752
55.2 Robust Manufacturing p. 1754
55.3 Stable Field Performance p. 1769
References p. 1772
56 Packaging and Reliability Issues in Micro/Nano Systems Jongbaeg Kim and Yu-Ting Cheng and Mu Chiao and Liwei Lin p. 1777
56.1 Introduction to Micro-/Nano-Electromechanical (MEMS)/(NEMS) Packaging p. 1777
56.2 Hermetic and Vacuum Packaging and Applications p. 1783
56.3 Thermal Issues and Packaging Reliability p. 1791
56.4 Future Trends and Summary p. 1798
References p. 1799
Part H Technological Convergence and Governing Nanotechnology
57 Technological Convergence from the Nanoscale William Sims Bainbridge p. 1807
57.1 Nanoscience Synergy p. 1807
57.2 Dynamics of Convergence from the Nanoscale p. 1810
57.3 Ethical, Legal and Social Implications p. 1811
57.4 Transformative Synthesis p. 1814
57.5 Cultural Implications of Convergence p. 1816
57.6 Conclusion p. 1819
References p. 1819
58 Governing Nanotechnology: Social, Ethical and Human Issues William Sims Bainbridge p. 1823
58.1 Social Science Background p. 1823
58.2 Human Impacts of Nanotechnology p. 1827
58.3 Regulating Nanotechnology p. 1830
58.4 The Cultural Contextfor Nanotechnology p. 1832
58.5 Conclusions p. 1835
References p. 1835
Acknowledgements p. 1841
About the Authors p. 1845
Subject Index p. 1877