简介
The interface, affectionately known as NAMIX, intends to bridge the gap between very tiny microsystem technology and very, very tiny nanotechnology, both of which are becoming increasingly important in new products and production technologies in nearly all industrial branches. Scientists from universities and companies around the world cover nanotechnology research funding and commercialization prospects, fundamentals and technology, and applications. The specific topics include technological marketing for early nanotechnologies, the microwave-driven hydrothermal synthesis of oxide nanopowders for applications in optoelectronics, and nanoparticles-based chemical gas sensors for outdoor air quality monitoring. Annotation 漏2004 Book News, Inc., Portland, OR (booknews.com)
目录
Preface 7
Contents 11
List of Contributors 21
I Nanotechnology Research Funding and Commercialization Prospects 27
U.S. National Nanotechnology Initiative: Planning for the Next Five Years 29
1 Introduction 29
2 Government R&D Investments 30
References 35
Technological Marketing for Early Nanotechnologies 37
1 Introduction 37
1.1 Managerial Synthesis with Recommendations 38
1.2 Working Definitions 39
1.2.1 Nanotechnology Product 39
1.2.2 Innovation 40
1.2.3 Technological Function 40
1.2.4 Application 40
1.2.5 Market Segmentation 40
1.2.6 Translation Process 40
1.2.7 Collective Learning Process 40
1.3 Setting the Scene 41
1.4 \u201cRaison d\u2019锚tre\ 42
1.5 \u201cRaison d\u2019锚tre\u201d of Management Thinking and Strategic Planning for Nanotechnologies 42
1.6 Problematic Nanotechnologies 43
1.6.1 Discovery 44
1.6.2 Integration 44
1.6.3 Exploitation 44
2 Marketing for a Nanotechnological Innovation 45
2.1 Marketing Study Budget 45
2.2 Collecting Information for Marketing Tools 46
2.3 Technical Analysis 47
2.3.1 Components 47
2.3.2 Functions 48
2.3.3 Matrix of Functions and Applications 48
2.3.4 Value Analysis 48
2.3.5 Technological Competition 49
2.4 Commercial Analysis 49
2.4.1 Influence Matrix and Drive/Dependence Matrix 50
2.4.2 Customer Behavior Towards Innovation 50
2.4.3 Analysis of Key Commercial Success Factors 50
2.5 Defining a Price 51
2.5.1 The Cost Comparison Study: Step 1 51
2.5.2 The Cost Comparison Study: Step 2 51
2.6 Quantified Diagnostic and Simulations 52
2.6.1 Simulations on the Diagnostic Matrix 52
2.6.2 Exploitation of the Diagnostic Matrix 53
3 Management Thinking and Strategic Planning for Small Nanotechnology Businesses 53
3.1 Strategic Planning: from Segment Action Plan to Business Action Plan 53
3.2 Co-Developing with a Big Player 53
3.2.1 The Six Sigma Method to Stimulate a Disruptive Change 54
3.2.2 Management Tools for Change 54
3.3 Mastering the Translation Process 56
3.3.1 Example 56
3.3.2 Nanotechnology Team Building 57
3.4 Formulating a Strategy 57
3.5 Implementing the Strategy 57
4 Conclusions 58
5 Appendix 58
References 59
Asia\u2013Pacific Nanotechnology: Research, Development, and Commercialization 61
1 Nanotechnology Funding in the Asia\u2013Pacific Region 61
2 Commercialization Efforts 65
3 Private Investment in Nanotechnology 66
4 Advantages of Collaborating with Asians 67
5 Appendix 68
Cooperation with Small- and Medium-Sized Enterprises Boosts Commercialization 75
1 The Company 75
2 Scope 75
3 Proposition: In Current Technology Markets, Commercial Success of New Product Ideas Evolves from Cooperation 77
4 Proposition: Innovations Get on a Fast Track to Market if Implemented in SME 80
5 Proposition: Competencies of SME and Inventors are Complementary Rather than Competing 81
6 Summary 83
References 83
Rapid Commercialization of Nanotechnology in Japan: from Laboratory to Business 85
1 Background: Japan at the Crossroads 85
2 Motivation and Strategy: Shake up Unique People 85
3 Research and Development of a New Idea 86
4 Pump Priming and Leadership 87
5 Nanotechnology Activities 87
5.1 Bio Nanotec Research Institute, Inc. (BNRI): Zeolite Membranes 87
5.2 Carbon Nanotech Research Institute, Inc. (CNRI): Clean Single-Walled Carbon Nanotubes 88
5.3 Device Nanotech Research Institute, Inc. (DNRI) 89
5.3.1 R&D Projects at DNRI 89
5.3.2 DNRI Nanoimprinting Technology Load Map 90
5.3.3 Photonic Crystal Waveguides for Controlling Chromatic Dispersion 90
5.4 Ecology Nanotech Research Institute (ENRI): Metallofullerene 92
5.5 INRI, Inc. (for Intellectual Property): Approach and Strategy 94
6 Conclusions 94
Nanomaterials and Smart Medical Devices 97
1 Introduction 97
2 Why are we Seeing Advances Now? 98
3 Conclusion 101
II Fundamentals and Technology 103
Bridging Dimensional and Microstructural Scaling Effects 105
1 Introduction 105
2 Nanocrystalline Materials 106
3 Nano/Microsystem Technology 107
4 Present Gap Between Nanomaterials and Nano/Microsystem Technology 108
5 Bridging Dimensional and Microstructural Scaling Effects 110
6 Conclusions 113
References 114
Bridging the Gap between Nanometer and Meter 115
1 Introduction 115
2 Motivation 115
3 Bridging the Gap 117
4 Examples of Measurement 120
4.1 Structured Si Wafer 120
4.2 Bump Measurements 123
4.3 LED Housing 125
4.4 Film Thickness Measurement 126
4.5 Elastic Properties with AFAM 128
References 131
Nanometer-Scale View of the Electrified Interface: Scanning Probe Microscopy Study 133
1 Introduction 133
2 STM z\u2013V Spectroscopy 135
3 Experimental Details 139
3.1 Alq(3) Thin Films on Au(111) 139
3.2 CuPc Thin Films on Au(111) 140
4 Concluding Remarks 142
References 143
New Technology for an Application-Specific Lab-on-a-Chip 145
1 Introduction 145
2 Fabrication Technologies 147
3 Experimental Results 150
3.1 Amorphous Silicon Pin-Diodes 150
3.2 Amorphous Silicon Thin Film Transistors 156
3.3 Microfluidic Devices 158
4 Conclusions 161
References 162
Impact of Nanoscience on Heterogeneous Catalysis 165
1 Introduction 165
2 Nanotechnology in Catalysis 165
3 Electronic Structure and Catalysis 166
4 Geometric Structure and Catalysis 167
5 Large Nano-Objects in Catalysis 169
6 The Semiconductor Approach 171
7 The Combicat Approach 171
8 Conclusions 174
References 175
Biomimetic Nanoscale Structures on Titanium 177
1 Introduction 177
2 Biocompatibility 178
References 187
Microwave-Driven Hydrothermal Synthesis of Oxide Nanopowders for Applications in Optoelectronics 189
1 Introduction 189
2 Experimental Methods 190
2.1 The Reactor for the Synthesis of Nanopowders 190
2.2 Hydrothermal Synthesis of ZnO, ZrO(2), and Zr(1\u2013x)Pr(x)O(2) 191
2.3 Characterization of the Powders 191
2.4 Sol-Gel Synthesis of YAG doped with 1% Nd 192
2.5 Investigations of Luminescence Properties 192
2.6 Sintering 192
3 Results and Discussion 193
3.1 The Properties of the Powders 193
3.1.1 ZrO(2) and Zr(1\u2013x)Pr(x)O(2) Powders 193
3.1.2 ZnO Powders 198
3.2 Investigations of Luminescence 199
3.2.1 Luminescence of Zr(1\u2013x)Pr(x)O(2) 199
3.2.2 Cathodoluminescence of ZnO 201
3.3 Luminescence of Sintered and Not Sintered YAG Nanocrystals 203
4 Conclusions 203
References 204
New Approach to Improve the Piezoelectric Quality of ZnO Resonator Devices by Chemomechanical Polishing 207
1 Introduction 207
2 Experimental 210
3 Results and Discussion 211
4 Conclusions 218
References 219
Self-Assembled Semiconductor Nanowires 221
1 Introduction 221
2 Growth 222
3 Positioning Nanowires 225
3.1 Stability 226
4 Transistors and Sensors 227
4.1 Interface Control and Insulator Material 227
4.2 Device Stability 228
4.3 Doping 228
4.4 Device Physics 228
4.5 Mobility 231
4.6 Contacts 231
5 Conclusion 232
References 232
3D Nanofabrication of Rutile TiO(2) Single Crystals with Swift Heavy-Ions 233
1 Introduction 233
2 Experimental 234
3 Results 235
4 Discussion 243
5 Conclusions 247
References 248
III Applications 251
Nanoparticles-Based Chemical Gas Sensors for Outdoor Air Quality Monitoring 253
1 Objectives 253
2 Current Status of Semiconductor Sensors 254
3 New Paradigms for the Advancement of Semiconductor Sensors 255
3.1 Advantage of Using Nanoparticles 255
3.2 Control of the Physical and Chemical Properties of Nanoparticles 255
3.3 Optimization of the Screen-Printing Process 256
4 Results 256
4.1 Characterization of Nanoparticles 256
4.2 Surface Chemistry of Nanoparticles 257
4.3 Rapid Screening of the Sensing Potential of the Nanoparticles 258
4.4 First Optimization Stage of the Screen-Printing Process 259
4.5 Second Optimization Stage of the Screen-Printing Process 260
5 Outlook 263
References 264
Amorphous Electrically Conducting Materials for Transducer Applications 265
1 Introduction 265
2 Mictamict Alloys 265
3 Thin Films 266
4 Properties of Ta\u2013Si\u2013N Films 266
5 MEMS of Ta\u2013Si\u2013N Films 267
6 Surface Micromachining of Ta\u2013Si\u2013N Microbeams 267
7 X-Ray Analysis of Ta\u2013Si\u2013N Films 268
8 Ta\u2013Si\u2013N Thin Films as Diffusion Barriers for Cu Metallization 270
References 272
Commercial Applications of Diamond-Based Nano- and Microtechnology 273
1 Introduction 273
1.1 Properties of Diamond 273
1.2 Synthesis of Diamond 274
2 Commercial Applications: Cutting Tools and Micromechanical Diamond Parts 277
2.1 Diamond Cutting Tools 278
2.1.1 Application 278
2.1.2 Novel Process: the Diamaze Blade 280
2.1.3 Advantages: Socio-economic Impact 282
2.1.4 Future Aspects 282
2.2 Diamond Micromechanical Parts 283
2.2.1 Application 283
2.2.2 Design 284
2.2.3 Production of Diamond Micromechanical Parts: Diamond-Toothed Wheels 284
2.2.4 Diamond Microgear 285
3 Summary 287
References 288
Bio-Inspired Anti-reflective Surfaces by Imprinting Processes 289
1 Introduction 289
2 Aluminum Oxide: Template and Lithographic Tool 289
3 Reflection of Light 293
4 Anti-reflective Coatings and Surface Structures 295
4.1 Plasma Coating 295
4.2 Porous Ceramics 296
4.3 Moth-Eye Structures 297
4.3.1 LIGA Technology 298
4.3.2 Nanoporous Alumina Tools (AlCoStruct) 299
5 Surface Wetting 302
6 Conclusions 304
References 305
Preparation and Properties of MgO\u2013Ni(Fe) Nanocrystalline Composites 307
1 Introduction 307
2 Experimental 308
3 Results and Discussion 308
4 Conclusions 312
References 313
Nanocrystalline Oxides Improve the Performances of Polymeric Electrolytes 315
1 Introduction 315
2 Results and Discussion 316
2.1 Direct Methanol Fuel Cells 316
2.2 Lithium Ion Polymeric Batteries 319
2.3 Electrophysiological Measurements 321
3 Conclusions 325
References 326
Optimized Electromechanical Properties and Applications of Cellular Polypropylene, a New Voided Space-Charge Electret Material 329
1 Introduction 329
2 Investigations on Cellular PP 330
2.1 Film Preparation 330
2.2 Electro-Active Properties 332
2.3 Assessment of the Charging Process 332
2.3.1 Dependence on the Charging Field: Threshold Behavior 332
2.3.2 Independence from the Charging Method 333
2.3.3 Dependence on the Charging Time 334
2.3.4 Switching of Polarization 334
2.3.5 Electroluminescence During Charging 335
2.3.6 Influence of the Ambient Gas During Charging 335
2.3.7 Summary of Charging Evaluation 336
3 Applications 336
3.1 Proposed Electromechanical and Electroacoustical Transducer Concepts 336
3.2 Control Panels with Pushbuttons Made of Cellular PP Electrets 337
3.3 Concept for Vibration Control 338
3.4 Concept for Active Noise Control 339
4 Conclusions 341
References 342
Subject Index 345
Contents 11
List of Contributors 21
I Nanotechnology Research Funding and Commercialization Prospects 27
U.S. National Nanotechnology Initiative: Planning for the Next Five Years 29
1 Introduction 29
2 Government R&D Investments 30
References 35
Technological Marketing for Early Nanotechnologies 37
1 Introduction 37
1.1 Managerial Synthesis with Recommendations 38
1.2 Working Definitions 39
1.2.1 Nanotechnology Product 39
1.2.2 Innovation 40
1.2.3 Technological Function 40
1.2.4 Application 40
1.2.5 Market Segmentation 40
1.2.6 Translation Process 40
1.2.7 Collective Learning Process 40
1.3 Setting the Scene 41
1.4 \u201cRaison d\u2019锚tre\ 42
1.5 \u201cRaison d\u2019锚tre\u201d of Management Thinking and Strategic Planning for Nanotechnologies 42
1.6 Problematic Nanotechnologies 43
1.6.1 Discovery 44
1.6.2 Integration 44
1.6.3 Exploitation 44
2 Marketing for a Nanotechnological Innovation 45
2.1 Marketing Study Budget 45
2.2 Collecting Information for Marketing Tools 46
2.3 Technical Analysis 47
2.3.1 Components 47
2.3.2 Functions 48
2.3.3 Matrix of Functions and Applications 48
2.3.4 Value Analysis 48
2.3.5 Technological Competition 49
2.4 Commercial Analysis 49
2.4.1 Influence Matrix and Drive/Dependence Matrix 50
2.4.2 Customer Behavior Towards Innovation 50
2.4.3 Analysis of Key Commercial Success Factors 50
2.5 Defining a Price 51
2.5.1 The Cost Comparison Study: Step 1 51
2.5.2 The Cost Comparison Study: Step 2 51
2.6 Quantified Diagnostic and Simulations 52
2.6.1 Simulations on the Diagnostic Matrix 52
2.6.2 Exploitation of the Diagnostic Matrix 53
3 Management Thinking and Strategic Planning for Small Nanotechnology Businesses 53
3.1 Strategic Planning: from Segment Action Plan to Business Action Plan 53
3.2 Co-Developing with a Big Player 53
3.2.1 The Six Sigma Method to Stimulate a Disruptive Change 54
3.2.2 Management Tools for Change 54
3.3 Mastering the Translation Process 56
3.3.1 Example 56
3.3.2 Nanotechnology Team Building 57
3.4 Formulating a Strategy 57
3.5 Implementing the Strategy 57
4 Conclusions 58
5 Appendix 58
References 59
Asia\u2013Pacific Nanotechnology: Research, Development, and Commercialization 61
1 Nanotechnology Funding in the Asia\u2013Pacific Region 61
2 Commercialization Efforts 65
3 Private Investment in Nanotechnology 66
4 Advantages of Collaborating with Asians 67
5 Appendix 68
Cooperation with Small- and Medium-Sized Enterprises Boosts Commercialization 75
1 The Company 75
2 Scope 75
3 Proposition: In Current Technology Markets, Commercial Success of New Product Ideas Evolves from Cooperation 77
4 Proposition: Innovations Get on a Fast Track to Market if Implemented in SME 80
5 Proposition: Competencies of SME and Inventors are Complementary Rather than Competing 81
6 Summary 83
References 83
Rapid Commercialization of Nanotechnology in Japan: from Laboratory to Business 85
1 Background: Japan at the Crossroads 85
2 Motivation and Strategy: Shake up Unique People 85
3 Research and Development of a New Idea 86
4 Pump Priming and Leadership 87
5 Nanotechnology Activities 87
5.1 Bio Nanotec Research Institute, Inc. (BNRI): Zeolite Membranes 87
5.2 Carbon Nanotech Research Institute, Inc. (CNRI): Clean Single-Walled Carbon Nanotubes 88
5.3 Device Nanotech Research Institute, Inc. (DNRI) 89
5.3.1 R&D Projects at DNRI 89
5.3.2 DNRI Nanoimprinting Technology Load Map 90
5.3.3 Photonic Crystal Waveguides for Controlling Chromatic Dispersion 90
5.4 Ecology Nanotech Research Institute (ENRI): Metallofullerene 92
5.5 INRI, Inc. (for Intellectual Property): Approach and Strategy 94
6 Conclusions 94
Nanomaterials and Smart Medical Devices 97
1 Introduction 97
2 Why are we Seeing Advances Now? 98
3 Conclusion 101
II Fundamentals and Technology 103
Bridging Dimensional and Microstructural Scaling Effects 105
1 Introduction 105
2 Nanocrystalline Materials 106
3 Nano/Microsystem Technology 107
4 Present Gap Between Nanomaterials and Nano/Microsystem Technology 108
5 Bridging Dimensional and Microstructural Scaling Effects 110
6 Conclusions 113
References 114
Bridging the Gap between Nanometer and Meter 115
1 Introduction 115
2 Motivation 115
3 Bridging the Gap 117
4 Examples of Measurement 120
4.1 Structured Si Wafer 120
4.2 Bump Measurements 123
4.3 LED Housing 125
4.4 Film Thickness Measurement 126
4.5 Elastic Properties with AFAM 128
References 131
Nanometer-Scale View of the Electrified Interface: Scanning Probe Microscopy Study 133
1 Introduction 133
2 STM z\u2013V Spectroscopy 135
3 Experimental Details 139
3.1 Alq(3) Thin Films on Au(111) 139
3.2 CuPc Thin Films on Au(111) 140
4 Concluding Remarks 142
References 143
New Technology for an Application-Specific Lab-on-a-Chip 145
1 Introduction 145
2 Fabrication Technologies 147
3 Experimental Results 150
3.1 Amorphous Silicon Pin-Diodes 150
3.2 Amorphous Silicon Thin Film Transistors 156
3.3 Microfluidic Devices 158
4 Conclusions 161
References 162
Impact of Nanoscience on Heterogeneous Catalysis 165
1 Introduction 165
2 Nanotechnology in Catalysis 165
3 Electronic Structure and Catalysis 166
4 Geometric Structure and Catalysis 167
5 Large Nano-Objects in Catalysis 169
6 The Semiconductor Approach 171
7 The Combicat Approach 171
8 Conclusions 174
References 175
Biomimetic Nanoscale Structures on Titanium 177
1 Introduction 177
2 Biocompatibility 178
References 187
Microwave-Driven Hydrothermal Synthesis of Oxide Nanopowders for Applications in Optoelectronics 189
1 Introduction 189
2 Experimental Methods 190
2.1 The Reactor for the Synthesis of Nanopowders 190
2.2 Hydrothermal Synthesis of ZnO, ZrO(2), and Zr(1\u2013x)Pr(x)O(2) 191
2.3 Characterization of the Powders 191
2.4 Sol-Gel Synthesis of YAG doped with 1% Nd 192
2.5 Investigations of Luminescence Properties 192
2.6 Sintering 192
3 Results and Discussion 193
3.1 The Properties of the Powders 193
3.1.1 ZrO(2) and Zr(1\u2013x)Pr(x)O(2) Powders 193
3.1.2 ZnO Powders 198
3.2 Investigations of Luminescence 199
3.2.1 Luminescence of Zr(1\u2013x)Pr(x)O(2) 199
3.2.2 Cathodoluminescence of ZnO 201
3.3 Luminescence of Sintered and Not Sintered YAG Nanocrystals 203
4 Conclusions 203
References 204
New Approach to Improve the Piezoelectric Quality of ZnO Resonator Devices by Chemomechanical Polishing 207
1 Introduction 207
2 Experimental 210
3 Results and Discussion 211
4 Conclusions 218
References 219
Self-Assembled Semiconductor Nanowires 221
1 Introduction 221
2 Growth 222
3 Positioning Nanowires 225
3.1 Stability 226
4 Transistors and Sensors 227
4.1 Interface Control and Insulator Material 227
4.2 Device Stability 228
4.3 Doping 228
4.4 Device Physics 228
4.5 Mobility 231
4.6 Contacts 231
5 Conclusion 232
References 232
3D Nanofabrication of Rutile TiO(2) Single Crystals with Swift Heavy-Ions 233
1 Introduction 233
2 Experimental 234
3 Results 235
4 Discussion 243
5 Conclusions 247
References 248
III Applications 251
Nanoparticles-Based Chemical Gas Sensors for Outdoor Air Quality Monitoring 253
1 Objectives 253
2 Current Status of Semiconductor Sensors 254
3 New Paradigms for the Advancement of Semiconductor Sensors 255
3.1 Advantage of Using Nanoparticles 255
3.2 Control of the Physical and Chemical Properties of Nanoparticles 255
3.3 Optimization of the Screen-Printing Process 256
4 Results 256
4.1 Characterization of Nanoparticles 256
4.2 Surface Chemistry of Nanoparticles 257
4.3 Rapid Screening of the Sensing Potential of the Nanoparticles 258
4.4 First Optimization Stage of the Screen-Printing Process 259
4.5 Second Optimization Stage of the Screen-Printing Process 260
5 Outlook 263
References 264
Amorphous Electrically Conducting Materials for Transducer Applications 265
1 Introduction 265
2 Mictamict Alloys 265
3 Thin Films 266
4 Properties of Ta\u2013Si\u2013N Films 266
5 MEMS of Ta\u2013Si\u2013N Films 267
6 Surface Micromachining of Ta\u2013Si\u2013N Microbeams 267
7 X-Ray Analysis of Ta\u2013Si\u2013N Films 268
8 Ta\u2013Si\u2013N Thin Films as Diffusion Barriers for Cu Metallization 270
References 272
Commercial Applications of Diamond-Based Nano- and Microtechnology 273
1 Introduction 273
1.1 Properties of Diamond 273
1.2 Synthesis of Diamond 274
2 Commercial Applications: Cutting Tools and Micromechanical Diamond Parts 277
2.1 Diamond Cutting Tools 278
2.1.1 Application 278
2.1.2 Novel Process: the Diamaze Blade 280
2.1.3 Advantages: Socio-economic Impact 282
2.1.4 Future Aspects 282
2.2 Diamond Micromechanical Parts 283
2.2.1 Application 283
2.2.2 Design 284
2.2.3 Production of Diamond Micromechanical Parts: Diamond-Toothed Wheels 284
2.2.4 Diamond Microgear 285
3 Summary 287
References 288
Bio-Inspired Anti-reflective Surfaces by Imprinting Processes 289
1 Introduction 289
2 Aluminum Oxide: Template and Lithographic Tool 289
3 Reflection of Light 293
4 Anti-reflective Coatings and Surface Structures 295
4.1 Plasma Coating 295
4.2 Porous Ceramics 296
4.3 Moth-Eye Structures 297
4.3.1 LIGA Technology 298
4.3.2 Nanoporous Alumina Tools (AlCoStruct) 299
5 Surface Wetting 302
6 Conclusions 304
References 305
Preparation and Properties of MgO\u2013Ni(Fe) Nanocrystalline Composites 307
1 Introduction 307
2 Experimental 308
3 Results and Discussion 308
4 Conclusions 312
References 313
Nanocrystalline Oxides Improve the Performances of Polymeric Electrolytes 315
1 Introduction 315
2 Results and Discussion 316
2.1 Direct Methanol Fuel Cells 316
2.2 Lithium Ion Polymeric Batteries 319
2.3 Electrophysiological Measurements 321
3 Conclusions 325
References 326
Optimized Electromechanical Properties and Applications of Cellular Polypropylene, a New Voided Space-Charge Electret Material 329
1 Introduction 329
2 Investigations on Cellular PP 330
2.1 Film Preparation 330
2.2 Electro-Active Properties 332
2.3 Assessment of the Charging Process 332
2.3.1 Dependence on the Charging Field: Threshold Behavior 332
2.3.2 Independence from the Charging Method 333
2.3.3 Dependence on the Charging Time 334
2.3.4 Switching of Polarization 334
2.3.5 Electroluminescence During Charging 335
2.3.6 Influence of the Ambient Gas During Charging 335
2.3.7 Summary of Charging Evaluation 336
3 Applications 336
3.1 Proposed Electromechanical and Electroacoustical Transducer Concepts 336
3.2 Control Panels with Pushbuttons Made of Cellular PP Electrets 337
3.3 Concept for Vibration Control 338
3.4 Concept for Active Noise Control 339
4 Conclusions 341
References 342
Subject Index 345
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