Table Of Contents:
Preface 1(2)

Form macrooptics to microoptics --- an overview 3(12)

Optics technology 3(2)

Classification of optical hardware 5(1)

Optical functions and their implementation 6(4)

Scope of this book 10(1)

Organization of the book 10(2)

Further reading 12(1)

Acknowledgment 13(2)

Optical components with small dimensions 15(22)

Microlens performance 15(12)

Diffraction limit 15(2)

Aberrations 17(4)

Quality criteria for lens performance 21(6)

Scaling --- from macro- to micro-components 27(5)

Scaling of diffractive and refractive lenses 27(3)

Scaling of prisms 30(2)

Glossary 32(1)

List of symbols 33(1)

Exercises 34(3)

Lithographic fabrication technology 37(48)

Pattern generation 38(12)

Plotting and photoreduction 40(1)

Laser beam writing 40(2)

X-ray and e-beam writing 42(5)

Grey-level masks 47(3)

Special masks 50(1)

Coating or thin layer deposition 50(4)

Spin coating 51(1)

Physical vapour deposition (PVD) 51(3)

Chemical Vapour Deposition (CVD) 54(1)

Alignment and exposure 54(7)

Exposure geometry 55(2)

Light sources for mask lithography 57(1)

Illumination with x-ray (synchrotron) and proton radiation 58(1)

Multimask alignment 59(2)

Through-wafer alignment 61(1)

Pattern transfer 61(12)

Etching 63(5)

Laser micromachining --- laser initiated ablation 68(1)

Mechanical micromachining --- diamond turning of microoptical components 69(1)

Replication of microrelief structures 70(3)

Diffusion --- ion-exchange processes 73(1)

Bonding of planar structures 73(5)

Flip-chip bonding 74(2)

Thermo-anodic bonding 76(2)

Glossary 78(1)

List of new symbols 79(1)

Exercises 80(5)

Refractive microoptics 85(44)

Surface profile microlenses 86(18)

Melted photoresist lenses
reflow lenses 86(7)

Microlens fabrication by mass transport mechanisms in semiconductors 93(1)

Microlenses formed by volume change of a substrate material 94(2)

Lithographically initiated volume growth in PMMA for microlens fabrication 96(3)

Dispensed or droplet microlenses 99(1)

Direct writing techniques for refractive microoptics 100(3)

Grey-scale lithography for ROE fabrication 103(1)

Gradient-index (GRIN) optics 104(11)

GRIN rod lenses 105(3)

Planar GRIN lenses 108(7)

Microprisms and micromirrors 115(6)

Lithography for the fabrication of microprisms 116(3)

Micromachining of microprisms using single point diamond turning or embossing 119(1)

Anisotropic etching of mirror structures in crystalline materials 119(2)

Glossary 121(1)

List of new symbols 122(1)

Exercises 123(6)

Diffractive microoptics 129(52)

Trading spatial resolution for reduced phase thickness 129(5)

Blazing and phase quantization 129(3)

Alternative quantization schemes for microlenses 132(2)

Examples of diffractive optical components 134(1)

Fabrication of diffractive optics 134(5)

Multimask processing for kinoform DOEs 135(2)

Fabrication errors for kinoform elements 137(2)

Modelling of diffractive optics 139(28)

Approaches to rigorous diffraction theory 140(3)

Thin and thick gratings 143(2)

Scalar diffraction theory 145(2)

Fresnel and Fraunhofer diffraction 147(1)

Linear kinoform grating 148(3)

Diffractive lenses 151(5)

Ray-tracing analysis of diffractive lenses 156(2)

Chromatic aberrations of diffractive lenses 158(1)

Detour-phase diffractive optical elements 158(3)

Polarisation-selective diffractive optical elements 161(1)

Holographic optical elements as thick Bragg gratings 161(5)

Effective medium theory of zero-order gratings 166(1)

Design of diffractive optical elements 167(5)

DOEs optimized for imaging along a tilted optical axis 167(2)

Iterative design techniques for DOEs 169(3)

Glossary 172(1)

List of new symbols 173(1)

Exercises 174(7)

Integrated waveguide optics 181(26)

Modes in optical waveguides 181(5)

Discrete waveguide modes 182(2)

Field distribution of the modes 184(2)

Waveguide couplers and beam splitters 186(6)

External coupling 186(3)

Coupling between waveguides 189(2)

3 dB couplers for beam splitting 191(1)

Branching waveguides 192(1)

Waveguide optical modulators 192(4)

The electro-optic effect 192(1)

The electro-optic phase modulator 193(1)

Polarisation modulator --- dynamic phase retarder 193(1)

Integrated intensity modulators 194(1)

Electro-optic directional couplers 195(1)

Applications of waveguide optics 196(6)

Waveguide optics in optical interconnects 196(3)

Waveguide optical sensors 199(3)

Glossary 202(1)

List of new symbols 203(1)

Exercises 204(3)

Microoptical systems 207(24)

Systems integration 208(7)

MOEMS for optical systems integration 208(3)

Stacked optics 211(2)

Planar optics 213(2)

Imaging systems for optical interconnects 215(11)

Dilute arrays 215(2)

Conventional imaging 217(1)

Multichannel imaging system 218(3)

Hybrid imaging 221(1)

Integrated microoptical imaging systems 222(4)

Glossary 226(1)

List of new symbols 227(1)

Exercises 228(3)

Optoelectronic devices and smart pixel arrays 231(24)

Superlattices and multiple quantum wells 231(3)

Hetero-superlattices 232(1)

nipi-superlattices 233(1)

The SEED (self electro-optic effect device) 234(5)

Structure and fabrication 234(1)

Energy dissipation and efficiency 235(1)

All-optical modulation 236(1)

S-SEED 237(1)

Performance of S-SEEDs 237(2)

Vertical cavity surface emitting lasers 239(8)

Structure and fabrication 239(3)

Mirrors and resonator 242(2)

I-V characteristics and efficiency 244(1)

Spectral characteristics and thermal effects 245(1)

Other material combinations 246(1)

Smart pixel arrays (SPAs) 247(3)

Glossary 250(1)

List of new symbols 251(1)

Exercises 252(3)

Array illuminators 255(28)

Image plane array illumination 257(6)

Phase-contrast array illumination 258(4)

Multiple beam-splitting through aperture division 262(1)

Multiple beam-splitting through waveguide coupling 262(1)

Fresnel plane array illuminators 263(3)

Fourier plane array illuminators 266(9)

Dammann gratings 267(4)

Modifications of Dammann's design procedure 271(2)

Lenslet arrays as Fourier plane array illuminators 273(2)

Cascading of beam-splitter gratings 275(1)

Summary 275(2)

Glossary 277(1)

List of new symbols 278(1)

Exercises 279(4)

Microoptical components for beam shaping 283(30)

Beam shaping from a general perspective 285(3)

Lateral laser beam shaping 288(6)

Collimation of astigmatic beams 288(3)

Beam shaping for laser machining 291(2)

Beam shaping for LIDAR 293(1)

Axial beam shaping 294(3)

Temporal beam shaping 297(2)

Multiple aperture beam shaping 299(1)

Intra-cavity beam shaping 300(5)

Intra-cavity beam shaping of individual laser beams 300(3)

Intra-cavity beam shaping of arrays of laser beams 303(2)

Glossary 305(1)

List of new symbols 306(1)

Exercises 307(6)

Microoptics for optical information technology 313(38)

Optical information processing 313(2)

Analog information processing 313(2)

Digital optical information processing 315(1)

Optical interconnects 315(8)

Terminology 316(2)

Interconnect hierarchy 318(4)

Optical clock distribution 322(1)

Microoptics for optical data storage 323(17)

Basics of optical data storage 324(3)

Microoptics for read/write heads 327(7)

Volume optical memories 334(6)

Glossary 340(2)

List of new symbols 342(1)

Exercises 343(8)

Further application areas of microoptics 351(28)

Microlens arrays for imaging 352(3)

Beam steering with microoptical components 355(5)

Microoptical sensors 360(4)

Shack-Hartmann wavefront sensor 360(1)

Confocal sensing using microoptics 361(3)

Microoptics for optical design 364(7)

Achromatic diffractive/refractive doublets 364(2)

Multi-order lenses 366(2)

Athermalization with hybrid elements 368(3)

Glossary 371(1)

List of new symbols 372(1)

Exercises 373(6)
Conclusion 379(2)
Abbreviations 381(2)
Solutions to exercises 383